谐振器
灵敏度(控制系统)
分叉
噪音(视频)
分岔理论
非线性系统
能量(信号处理)
振幅
控制理论(社会学)
物理
点(几何)
声学
计算机科学
拓扑(电路)
电子工程
数学
电气工程
光电子学
工程类
光学
量子力学
人工智能
几何学
图像(数学)
控制(管理)
作者
Milind Pandit,Chun Zhao,Guillermo Sobreviela,Sijun Du,Xudong Zou,Ashwin A. Seshia
出处
期刊:Journal of microelectromechanical systems
[Institute of Electrical and Electronics Engineers]
日期:2019-04-01
卷期号:28 (2): 182-188
被引量:24
标识
DOI:10.1109/jmems.2019.2894953
摘要
In this paper, energy localization within weakly coupled nonlinear MEMS resonators has been utilized for sensing applications. The sensitivity and the noise floor of the weakly coupled resonators operating beyond the critical amplitude have been characterized at the boundaries of the unstable branch, termed as bifurcation points in this paper. The measurement results show that such measurements can provide beneficial gains in resolution when compared with linear operation, despite the reduced sensitivity at the top bifurcation point. A minimum input-referred noise floor of 18 ppb/Hz 1/2 has been achieved through this sensing scheme which is a 40 % betterment in comparison to its linear counterpart.
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