Geomorphometry for studying model and experimental surface data

Abstract Geomorphometric methods can be used for improving the visibility of distribution data maps. The results of the finite element modeling, scanning electron microscopy and atomic force microscopy data processing are presented. The mechanical stresses in the redistribution layers structure, the homogeneity of the multilayer film, and the surface morphological features were studied. It was shown that the use of morphometric variable maps is effective for localizing inhomogeneities and makes it possible to detect structural features that are almost invisible in the original distribution data maps.