Additive Manufacturing for Terahertz Metamaterials on the Dielectric Surface based on Optimized Electrohydrodynamic Drop-on-demand Printing Technology

The conventional techniques used to fabricate terahertz metamaterials, such as photolithography and etching, face hindrances in the form of high costs, lengthy processing cycles, and environmental pollution. In contrast, electrohydrodynamic (EHD) drop-on-demand (DOD) printing technology holds promise as an additive manufacturing method capable of producing micrometer- and nanometer-scale patterns rapidly and cost-effectively. However, achieving stable large-area printing proves challenging due to issues related to charge accumulation in insulated substrates and inconsistent meniscus vibration. In this paper, a smooth bipolar waveform driving method is proposed aimed at solving the problems of charge accumulation on insulated substrates and poor print consistency. The method involves utilizing driving waveforms with opposite polarities for neighboring droplets, allowing the charges carried by the printed droplets to neutralize each other. Moreover, extending the duration of the high voltage rise and fall times enhances the consistency of meniscus motion, thereby improving the stability of printing. Through optimization of the printing parameters, droplets with a diameter of 1.37 μm and straight lines with a width of 3 μm were printed. Furthermore, this approach was employed to print terahertz metamaterial surface devices, and the performance of the metamaterial is in good agreement with the simulation results. These findings demonstrate that the method greatly improves the stability of EHD DOD printing, thereby advancing the application of the technology in additive processing at the micro- and nanoscale.