纳米机电系统
材料科学
微电子机械系统
石墨烯
压阻效应
纳米技术
光电子学
制作
谐振器
薄脆饼
蚀刻(微加工)
图层(电子)
纳米颗粒
病理
医学
替代医学
纳米医学
作者
L Saipriya,Akepati Deekshitha,- Shreya,Shubhika Verma,Ch. Swathi,C Manjunatha
出处
期刊:ECS transactions
[The Electrochemical Society]
日期:2022-04-24
卷期号:107 (1): 10997-11005
标识
DOI:10.1149/10701.10997ecst
摘要
Microelectromechanical systems (MEMS) are generally known as miniaturized mechanical and electro-mechanical systems, whereas NEMS stands for nanoelectromechanical systems. Graphene is an atomically thin material that features unique properties, such as high carrier mobility, high mechanical strength, and piezoresistive electromechanical transduction, which makes it an extremely promising material for future MEMS and NEMS devices. Design and fabrication of MEMS/NEMS devices using graphene process includes trench etching, wafer backside etching, graphene transfer, and mass release, which are described in a comprehensive manner. This review provides interesting perspectives for lock-in detection of weak fluorescent signals, NEMS position detection, electromechanical control of the on-chip transmitter, and single-photon-level fast electromechanical optical modulation. There are various applications of MEMS/NEMS devices, namely radio frequency devices, optic NEMS, pressure sensors, inertial sensors, which have been discussed in detail. The review mainly focusses on the devices made up of graphene (atom-layer distance of ~0.335 nm) as a main electronic/mechanical material due to its remarkable mechanical and electrical (Young’s modulus of up to ~1 TPa cm 2 Vs-1) and charge-carrier mobility of up to 200,000, which makes it an extremely promising membrane and transducer material for MEMS/NEMS system applications. Modern MEMS/NEMS experiments utilize mechanical resonators to push the bounds of force and mass sensing, demonstrate novel electromechanical circuit applications, measure the structural properties of materials are also covered in this review.
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