波纹度
抛光
研磨
计算机科学
路径(计算)
树(集合论)
空间频率
光学
材料科学
物理
数学
复合材料
数学分析
程序设计语言
作者
Chong Wang,Young Hwan Han,Haiyang Zhang,Chenlong Liu,Liang Jiang,Linmao Qian
出处
期刊:Optics Express
[The Optical Society]
日期:2022-07-25
卷期号:30 (16): 29216-29216
被引量:7
摘要
Mid-spatial-frequency (MSF) errors seriously damages the imaging performance of optical components. Path pattern is an important factor that affects the generation of MSF waviness in polishing. This paper proposes a versatile pseudo random tree-shaped path (RTSP) generation method imitating the growth rules of tree branch in nature, which can efficiently generate continuous, uniformly distributed and multi-directional paths on a specified surface. Furthermore, the effectiveness of RTSP to suppress MSF waviness is verified by numerical simulation and experimental results. Finally, the RTSP is applied to the polishing of Ti-6Al-4V titanium alloy mirror. Results indicate that grinding marks have been significantly removed, while no obvious MSF waviness is introduced.
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