The Study of Infrared Photocarrier Radiometry Based on Si Semiconductor

Infrared photocarrier radiometry(PCR) has shown advantages of pure detection signal, bigger detection depth and more clear results since it emerges. But it is still in the starting stage. Generation and distribution of photocarrier excitated by modulated laser is stated, and the principle of PCR is discussed. Experiment on different sweeping frequencies is carried out and frequent characteristics are studied.The principle and experimental results are compared with PTR .The results show the most fit modulated frequency of PCR is around 10kHz, and the differences between the defect and non-defect area is bigger than that of PTR.