Fabricating a 2D imaging device using aerosol PZT process

Here we present a new rapid prototyped PZT MEMS actuator for potential 2D scanning endoscopic application. The proposed 6.1 mm x 7.1 mm x 5 μm thick film PZT push-pull actuator made by directly deposited on a thin 100 μm thick stainless steel substrate by using an aerosol deposition (AD) method. The actuator features a stable linear 2D vibration using 1-D actuation. Initial fabrication results, electrical impedance, mechanical will be presented and discussed.