Hysteresis Feedforward and Fuzzy PID Feedback Compound Control of Piezoelectric Ceramics

Abstract Aiming at the problem that the hysteresis nonlinearity of piezoelectric ceramics affects the positioning accuracy of micro-nano equipment, a composite control method based on Duhem model is studied. Firstly, the Duhem model is established and the parameters are identified, and the inverse model is taken as the feedforward control. Then, the fuzzy PID feedback control is designed. Finally, the feedforward combined with fuzzy PID feedback are used to control the piezoelectric ceramics. The simulation results show when the input signal frequency is 1Hz, 15Hz, 30Hz and 50Hz, the root mean square of feedforward combined with fuzzy PID feedback control is reduced by 0.0168 um, 0.0168 um, 0.0413 um, 0.0738 um, and 0.0016 um, 0.003 um, 0.0036 um, 0.0071 um respectively compared with single feedforward control and feedforward combined with PID compound control. The piezoelectric ceramic is applied to the micro-vibration suppression platform (MVSP) as an actuator. The experimental results show when the excitation frequency is 5Hz, 15H, 25Hz, 30Hz, 35Hz, 50Hz, the active and passive control of feedforward combined with fuzzy PID feedback composite control, compared with feedforward combined with PID composite control, the attenuation effect of vibration amplitude is increased by 6 %, 8 %, 9 %, 7 %, 15 %, 5 %. Compared with the active and passive control with single feedforward control, the attenuation effect of vibration amplitude is increased by 11 %, 13 %, 14 %, 13 %, 37 % and 34 % respectively, which proves the effectiveness of the control method and provides reference and theoretical basis for further suppressing the micro-vibration of high-precision equipment.