Theoretical basis and performance research on advanced non-contacting ion beam manufacturing process for optical materials

Abstract Ultra-smooth surface is very important for the performance of high energy optical system in the defence field. Low quality optical elements will cause energy loss and affect the performance of the optical system. Ultra-precision manufacturing technology of optical components is the key technology to obtain high quality optical components. As an advanced ultra-precision and no-contact surface processing technology, Ion Beam Manufacturing (IBM) was studied. Based on the analysis of the relationship between the ion beam current density distribution parameters obtained by faraday scan and the removal function, more effective removal function calculation method was found, the removal function model for IBF fused silica was established. The Molecular Dynamics(MD)simulation to study interaction between incident ion and optical substrate. Ion particle motion behaviour were obtained under different incident energies. The effect of incidence angle on surface roughness were carried out, lower surface roughness by smaller angle incident, ultra-precision surface of optical components were obtained by IBF experiments.