Ultrahigh Precision Machining of Polymer Surface using Laser-Induced Reactive Micro-Plasmas

The process requirements for ultra-precise machining of surfaces for optical applications is still challenging for laser ablation-based methods. The LIPE (laser-induced plasma etching) method combines the two complementary techniques of laser and plasma processing. Technologically important materials like SiO 2 , Ge, Si as well fiber-reinforced composites (SiC-SiC) have been successfully processed with LIPE, in particular Polyimide (Kapton@ HN (125 m)) and Polyethylenterephthalat. In the present paper, LIPE etching of polymer surface is demonstrated. The influence of the main process parameters on the etching rate as well as on the obtained surface characteristics will be shown and discussed in detail.