A novel method for increasing MEMS capacitive sensors sensitivity

One of the best detection methods for MEMS sensors is capacitance sensing method. In MEMS sensors, dimensions are reduced to microns, in such a small sizes, neglecting fringe capacitance is not reasonable, because fringe capacitance increases up to 75 percent of the total capacitance [1]. In this paper a new method for determining optimum sensitivity and linearity range considering fringing capacitance is presented. Also a novel approach decreasing fringing capacitance to increase sensitivity of capacitive sensors is proposed.