中间层
材料科学
三维集成电路
计算机科学
通过硅通孔
成套系统
互连
球栅阵列
光电子学
电子工程
生产线后端
薄脆饼
晶圆规模集成
包对包
晶圆级封装
集成电路封装
复合材料
蚀刻(微加工)
图层(电子)
作者
Kyoung-Lim Suk,Seok Hyun Lee,Jong Youn Kim,Hak Jin Kim,Su Chang Lee,Pyung Wan Kim,Jung Soo Byun,Dae Woo Kim,Dan Oh
出处
期刊:Electronic Components and Technology Conference
日期:2018-05-01
被引量:42
标识
DOI:10.1109/ectc.2018.00018
摘要
A new concept of Si-less redistribution layer (RDL) platform was proposed for server/HPC application with advantages of packaging cost reduction, warpage control, and enhanced reliability. In this paper, RDL interposer package with size larger than 3000mm 2 was fabricated. Warpage behavior, electrical performance and reliability of the RDL interposer package were evaluated. In order to predict warpage behavior of RDL interposer, the critical factors were defined. The electrical performance between Si interposer and RDL interposer was analyzed using electrical simulation and finally joint reliability was also compared in terms of predicted joint stress.
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