原子探针
聚焦离子束
材料科学
样品制备
离子束
Atom(片上系统)
显微镜
传输线
分析化学(期刊)
梁(结构)
纳米技术
离子
光学
化学
透射电子显微镜
计算机科学
机械工程
嵌入式系统
工程类
有机化学
物理
色谱法
作者
Chandra Macauley,Martina Heller,Alexander M. Rausch,Frank Kümmel,Peter Felfer
出处
期刊:PLOS ONE
[Public Library of Science]
日期:2021-01-19
卷期号:16 (1): e0245555-e0245555
被引量:18
标识
DOI:10.1371/journal.pone.0245555
摘要
Atom probe tomography (APT) is a powerful technique to obtain 3D chemical and structural information, however the ‘standard’ atom probe experimental workflow involves transfer of specimens at ambient conditions. The ability to transfer air- or thermally-sensitive samples between instruments while maintaining environmental control is critical to prevent chemical or morphological changes prior to analysis for a variety of interesting sample materials. In this article, we describe a versatile transfer system that enables cryogenic- or room-temperature transfer of specimens in vacuum or atmospheric conditions between sample preparation stations, a focused ion beam system (Zeiss Crossbeam 540) and a widely used commercial atom probe system (CAMECA LEAP 4000X HR). As an example for the use of this transfer system, we present atom probe data of gallium- (Ga)-free grain boundaries in an aluminum (Al) alloy specimen prepared with a Ga-based FIB.
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