Effects of Long-term Exposure of High and Low Humidity on Thin-film Humidity Sensors

The effects of long-term exposure of high and low humidity on thin-film humidity sensors are investigated. Five commercially available thin-film humidity sensors are initially calibrated in a humidity chamber as a reference before longterm exposure to high and low humidity. Then, the sensors are kept in a high-humidity environment (~95 %rh) for four months. After the exposure, the sensors are calibrated in the same manner as the initial calibration. Consequently, the device reading values from the humidity sensors are elevated up to about 5 %rh. Interestingly, the degree of elevation by the high-humidity exposure shows a negative correlation with the price of the humidity sensors. Humidity sensors are then kept in a low-humidity environment (~10 %rh) for another four months. After the exposure, a calibration similar to the initial calibration is performed. As a result, the device reading from humidity sensors is decreased, indicating a recovery from the effect of high-humidity exposure. The durability test conducted in this study provides experimental evidence for the use of thin-film humidity sensors in high-humidity environments such as greenhouses and food factories for a long period of time.