微电子机械系统
电池(电)
介孔材料
纳米颗粒
电极
光电子学
纳米技术
气体扩散
化学
材料科学
功率(物理)
催化作用
生物化学
物理
物理化学
量子力学
作者
Koichi Suematsu,Yuka Shin,Nan Ma,Tokiharu Oyama,Miyuki Sasaki,Masayoshi Yuasa,Tetsuya Kida,Kengo Shimanoe
标识
DOI:10.1021/acs.analchem.5b01767
摘要
Real-time monitoring of specific gas concentrations with a compact and portable gas sensing device is required to sense potential health risk and danger from toxic gases. For such purposes, we developed an ultrasmall gas sensor device, where a micro sensing film was deposited on a micro heater integrated with electrodes fabricated by the microelectromechanical system (MEMS) technology. The developed device was operated in a pulse-heating mode to significantly reduce the heater power consumption and make the device battery-driven and portable. Using clustered Pd/SnO2 nanoparticles, we succeeded in introducing mesopores ranging from 10 to 30 nm in the micro gas sensing film (area: ϕ 150 μm) to detect large volatile organic compounds (VOCs). The micro sensor showed quick, stable, and high sensor responses to toluene at ppm (parts per million) concentrations at 300 °C even by operating the micro heater in a pulse-heating mode where switch-on and -off cycles were repeated at one-second intervals. The high performance of the micro sensor should result from the creation of efficient diffusion paths decorated with Pd sensitizers by using the clustered Pd/SnO2 nanoparticles. Hence we demonstrate that our pulse-driven micro sensor using nanostructured oxide materials holds promise as a battery-operable, portable gas sensing device.
科研通智能强力驱动
Strongly Powered by AbleSci AI