Precision cutting of PDMS film with UV-nanosecond laser based on heat generation-diffusion regulation

Laser precision cutting of polydimethylsiloxane (PDMS) films technology will greatly promote development of flexible electronics industry. However, mechanism and optimization method of PDMS films laser cutting is still unclear. On one hand, mechanism of ultraviolet (UV) nanosecond laser precision cutting of PDMS films with laser ablation as the core was explored based on analysis of by-product components. On the other hand, laser cutting quality optimization method of heat generation- diffusion co-regulation was proposed based on the mechanism of laser ablation. The minimum width of the groove and the heat affected zone were obtained by regulating the heat generation process at room temperature, 67.1 ± 1.7 μm and 6.8 ± 0.8 μm, respectively. In addition, the heat diffusion process can be regulated by lowering ambient temperature to further optimize the quality of cut. Using this optimization method, a spring-shape flexible electrode was prepared, and circumferential stretch limit of this spring-shape flexible electrode has been increased from 10% to 150% compared with planar PDMS film flexible electrodes.