锑化镓
材料科学
兴奋剂
掺杂剂
镓
分析化学(期刊)
霍尔效应
硅
单晶
Crystal(编程语言)
电阻率和电导率
光电子学
结晶学
化学
冶金
超晶格
程序设计语言
工程类
色谱法
计算机科学
电气工程
作者
A. Mirowska,Witold M. Orłowski
标识
DOI:10.12693/aphyspola.122.1111
摘要
Gallium antimonide (GaSb) single crystals were grown by modied Czochralski method integrated with in situ synthesis in a owing atmosphere of pure hydrogen.The inuence of charge material purity as well as other technological parameters on GaSb crystals quality was investigated.High purity undoped GaSb single crystals were grown with residual acceptors concentration < 1.4 × 10 17 cm -3 and high mobility ≈ 690 cm 2 /V s (at 300 K).P -type GaSb crystals were doped with silicon (carrier concentration up to 2 × 10 19 cm -3 ) and with zinc (up to 1 × 10 19 cm -3 ).Tellurium doped n-type GaSb single crystals were obtained with concentration up to 2 × 10 18 cm -3 .Electrical parameters were investigated by the Hall measurements (300 K and 77 K).Temperature dependent Hall measurements (10 ÷ 300 K) were used to compare the quality of undoped GaSb (obtained from Sb of dierent purity).Dopant concentration was estimated by glow discharge mass spectroscopy analysis.Axial and radial distribution of carrier concentration were investigated especially for Te-doped crystals (low segregation coecient of Te in GaSb).Great contribution of compensation and self-compensation mechanisms is shown especially for the beginning part of grown crystals and for low Te-doping level.Radial distribution of physical properties for crystals grown in ⟨100⟩ direction is not axisymmetrical especially for doped GaSb crystals.
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