<title>Microfabrication of overhanging shape using LCD microstereolithography</title>

Stereolithography is one of the Rapid Prototyping and manufacturing technologies which enable to fabricate three dimensional structures easily, quickly and automatically from computer-aided design (CAD) drawing. But it is much difficult to realize microfabrication quickly and accurately using conventional laser-scanning stereolithography due to thick layer of lamination and long time of fabrication. In order to overcome these difficulties, the liquid crystal display (LCD) microstereolthography has been developed in our laboratory, which enable microfabrication of a complete layer by only one irradiation, at high speed as well as high accuracy by continuous laminating of thin layers using the LCD as a live-motion mask. We performed the fundamental experiments to fabricate general 3D micro structure consisting of the overhanging shape using the LCD live-motion mask microstereolithography, and tried to fabricate a microspring with several ten micrometers size as one example.