Nanoscale scanning transmission electron tomography

Electron tomography enables the study of complex three-dimensional objects with nanometre resolution. In materials science, scanning transmission electron microscopy provides images with minimal coherent diffraction effects and with high atomic number contrast that makes them ideal for electron tomographic reconstruction. In this study, we reviewed the topic of scanning transmission electron microscopy-based tomography and illustrated the power of the technique with a number of examples with critical dimensions at the nanoscale.