Radial density profile measurement at different RF power in Argon plasma using RF compensated Langmuir probe

Langmuir probe is a powerful diagnostic tool for low pressure gas discharge plasmas, the ability of measurement of local plasma parameters and the electron energy distribution function (EEDF) makes it unique among other diagnostics. The Langmuir probe is consisting of small wire put in contact with the plasma thus measuring the current from the plasma at various applied voltages. We have fabricated Langmuir probe for the characterisation of RF produced plasma at SVITS, with calculated value of capacitor and inductor for the first and second Harmonics of frequency 13.56 MHz. A system has been designed, fabricated and installed at SVITS, Indore for producing tungsten coatings using Plasma Enhanced Chemical Vapor Deposition (PE-CVD) methodology. Variation of electron density with radial distance inside the plasma along the diameter of electrode ofRF Glow Discharge Argon Plasma will be discussed in this paper