Monolithic High Contrast Grating Integrated with Metal: Infrared Electrode with Exceptionally High Conductivity and Transmission

Abstract The design of transparent conductive electrodes (TCEs) for optoelectronic devices requires a trade‐off between high conductivity and transmittivity, limiting their efficiency. This paper demonstrates the best ever achieved TCEs with the novel approach to fabricating TCEs that effectively alleviates this trade‐off: a monolithic high contrast grating integrated with metal (metalMHCG). The metalMHCG enables higher electrical conductivity than other TCEs, while providing transmissive and antireflective properties. It focuses on infrared spectrum TCEs, which are essential for sensing, thermal imaging, and automotive applications. However, due to elevated free carrier absorption, they are much more demanding than TCEs for the visible spectrum. It demonstrates a record 75% absolute transmittiance of unpolarized light, resulting in a record 108% transmittance relative to plain GaAs substrate. It achieves even larger absolute transmittance of polarized light, reaching 92% or 133% relative transmittance. Despite the record high transmittance, the sheet resistance of the metalMHCG is the best ever reported, several times lower than any other TCE, ranging from 0.5 to 1 Ω Sq −1 .