A Comprehensive Review on the Physicochemical Properties and Microstructure of TiN films by Magnetron Sputtering

Surface Review and LettersAccepted Papers No AccessA Comprehensive Review on the Physicochemical Properties and Microstructure of TiN films by Magnetron SputteringShang Gao, Wenbin Song, Li Wang, Long Cheng, Yuyao Liu, Han Yin, Wenjun Zheng, Ying Zhu, Jun Tan, Jiaqi Li, Yiming Fei, Duan Gao, and Shengyi LiuShang Gao, Wenbin Song Search for more papers by this author , Li Wang Search for more papers by this author , Long Cheng Search for more papers by this author , Yuyao Liu Search for more papers by this author , Han Yin Search for more papers by this author , Wenjun Zheng Search for more papers by this author , Ying Zhu Search for more papers by this author , Jun Tan Search for more papers by this author , Jiaqi Li Search for more papers by this author , Yiming Fei Search for more papers by this author , Duan Gao Search for more papers by this author , and Shengyi Liuhttps://orcid.org/0000-0002-6586-3881 Search for more papers by this author https://doi.org/10.1142/S0218625X25300126Cited by:0 (Source: Crossref) Next AboutFiguresReferencesRelatedDetailsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail Cite Recommend We recommendThe protective properties of synthetic porphyrin tin complexes in toxic hyperbilirubinemiaT. O. PHILIPPOVA, Journal of Porphyrins and Phthalocyanines, 2012MELORHEOSTOSIS OF THE HAND: A COMPREHENSIVE REVIEWJ. Michael Wiater, The Journal of Hand Surgery (Asian-Pacific Volume), 2011Zn(II) phthalocyanines having fluoroether groups: Synthesis, characterization, photo-physicochemical and their biological propertiesKevser Harmandar, Journal of Porphyrins and Phthalocyanines, 2022A Comprehensive Review on the Chemical Composition, Pharmacology and Clinical Applications of GanodermaChenwang Liu, The American Journal of Chinese Medicine, 2023A Comprehensive Review of Licorice: the Preparation, Chemical Composition, Bioactivities and Its ApplicationsXiaoyu Ji, The American Journal of Chinese Medicine, 2024Comprehensive strategies for the prevention and control of pine wilt disease in China: a review and future directions Fengmao Chen, M Li, Journal of Forestry Research, 2024Preclinical and clinical trials of oncolytic vaccinia virus in cancer immunotherapy: a comprehensive review Mengyuan Li, Cancer Biology & Medicine, 2023Trending and emerging prospects of physics-based and ML-based wildfire spread models: a comprehensive review Harikesh Singh, Li-Minn Ang, Tom Lewis, et al., Journal of Forestry Research, 2024Comprehensive characterization of CRC with germline mutations reveals a distinct somatic mutational landscape and elevated cancer risk in the Chinese population Jianfei Yao, Cancer Biology & Medicine, 2022The Role of the Matrix Metalloproteinase-9 Gene in Tumor Development and Metastasis: A Narrative Review Datis Kalali, Global Medical Genetics, 2023Powered by Privacy policyGoogle Analytics settings FiguresReferencesRelatedDetailsNone Recommended Recommended PROPERTIES OF Ta2O5 THIN FILMS DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERINGJICHENG ZHOU, DITIAN LUO, YOUZHEN LI, and ZHENG LIUInternational Journal of Modern Physics BVol. 23, No. 27Annealing effect on indium tin oxide thin films by DC magnetron sputtering for alkali vapor cell heatingJianhua Li, Zhiyuan Jiang, Pingwei Lin, Xinhua Chen, Lin Zhong, Longfa Zhang, and Xueshen WangModern Physics Letters BVol. 33, No. 16GROWTH OF AZO FILMS ON BUFFER LAYERS BY RF MAGNETRON SPUTTERINGC. W. CHEN, C. H. TSENG, C. Y. HSU, C. P. CHOU, and K. H. HOUModern Physics Letters BVol. 24, No. 31The microstructure and mechanical properties of Ti(CoCr)N films produced by DC magnetron sputteringY. T. Li, Q. Y. Deng, D. L. Ma, H. Y. Liu, Y. X. Leng, and N. HuangInternational Journal of Modern Physics BVol. 33, No. 32PREPARATION OF INDIUM TIN OXIDE FILMS BY RADIO FREQUENCY MAGNETRON SPUTTERING UNDER LOW VACUUM LEVELH. B. ZHU, X. D. LI, S. Y. HUANG, C. X. JIN, Z. SUN, Y. W. CHEN, and S. M. HUANGSurface Review and LettersVol. 13, No. 06STRUCTURAL AND OPTICAL PROPERTIES OF γ-MO2N THIN FILMS DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERINGV. V. ATUCHIN, T. KHASANOV, V. A. KOCHUBEY, L. D. POKROVSKY, and T. A. GAVRILOVAInternational Journal of Modern Physics BVol. 23, No. 23PIEZOELECTRIC ALN THIN FILMS SYNTHESIZED BY MIDFREQUENCY DUALTARGET MAGNETRON SPUTTERINGPu CHEN, Qi-Cai PENG, Bin-Guang ZHAO, Lun ZENG, Ke-Qiang DENG, Hui-Hong DENG, and De-Wu YAOPiezoelectricity, Acoustic Waves and Device ApplicationsELECTRICAL AND OPTICAL PROPERTIES OF ZnO THIN FILMS PREPARED BY R.F. MAGNETRON SPUTTERINGJ. C. ZHOU, L. LI, L. Y. RONG, B. X. ZHAO, Y. M. CHEN, and F. LIInternational Journal of Modern Physics BVol. 25, No. 20 Accepted Papers Metrics Downloaded 0 times History Received 23 May 2024 Accepted 8 February 2025 PDF download