铷
Atom(片上系统)
碱金属
蚀刻(微加工)
吸收(声学)
材料科学
吸收光谱法
硅
谱线
化学
光电子学
纳米技术
光学
有机化学
图层(电子)
复合材料
冶金
嵌入式系统
钾
物理
计算机科学
天文
作者
Yali Liu,Wei Li,Yan Li,Xiaokuan Li,Liangsen Feng,Xinliang Li
标识
DOI:10.1088/1674-4926/43/12/122901
摘要
Abstract Chip-sized alkali atom vapor cells with high hermeticity are successfully fabricated through deep silicon etching and two anodic bonding processes. A self-built absorption spectrum testing system is used to test the absorption spectra of the rubidium atoms in alkali atom vapor cells. The influence of silicon cavity size, filling amount of rubidium atoms and temperature on the absorption spectra of rubidium atom vapor in the atom vapor cells are studied in depth through a theoretical analysis. This study provides a reference for the design and preparation of high quality chip-sized atom vapor cells.
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