制作
薄膜
卢瑟福背散射光谱法
材料科学
表征(材料科学)
扫描电子显微镜
蒸发
透射电子显微镜
分析化学(期刊)
真空蒸发
质谱法
电子束物理气相沉积
光学
纳米技术
化学
复合材料
物理
医学
色谱法
替代医学
病理
热力学
作者
Honey Arora,Abhilash S.R.,G.R. Umapathy,Asutosh Kapil,B. R. Behera
出处
期刊:Vacuum
[Elsevier]
日期:2022-07-01
卷期号:201: 111052-111052
标识
DOI:10.1016/j.vacuum.2022.111052
摘要
Fabrication of self-supporting 48Ti films of thickness ≈ 500μg/cm2 using 100 mg of the material by electron-beam evaporation technique in a high vacuum environment has been discussed. A simple and novel method of slowly evaporating the enriched material has been adopted in contrast to complex setup modifications utilized in earlier studies. Various techniques employed for successful fabrication of thin films have been discussed. The thickness measurements and characterizations of fabricated thin films have been carried out using advanced techniques viz., α-transmission method, Rutherford Backscattering Spectrometry (RBS), Energy Dispersive X-ray Spectrometry (EDS), Field Emission Scanning Electron Microscopy (FE-SEM), and Energy Dispersive X-ray Fluorescence (EDXRF). One of the fabricated targets has successfully been used in nuclear physics experiments.
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