Research on single vibrator gas piezoelectric pump

A single vibrator gas piezoelectric micro-pump has been presented in this work. The structure is designed and the dynamic modeling and simulation of the check valve which is the main component of pump are investigated. Based the analysis results, a proto type of gas micro-pump is fabricated and measured. The pump is driven by piezoelectric bimorph which has a hole in the middle, and a check valve is adhered to the hole to cut off fluid. The inlet and outlet is located in the two sides of the piezoelectric vibrator, and the on/off action of the check valve corresponding to the variation of the pump chamber is produced by the actuation vibration energy of piezoelectric vibrator. Compare with the traditional piezoelectric pump which inlet and outlet is located in one side and the check valve of it is driven by differential pressure on the two sides, it has lower fluid resistance and preferable unidirectional cut off characteristic. So the gas pumping ability and the response frequency of check valve are enhanced. The measured output flow rate of present design by experiment reaches 840 ml/min when driving voltage and frequency is 50 V and 1000 Hz.