Special Electric Characteristics of Superlattice Phase Change Memory
作者
Takasumi Ohyanagi,Masahito Kitamura,N. Takaura
出处
期刊：ECS transactions [Institute of Physics] 日期：2013-08-31卷期号：58 (5): 135-138
标识
DOI：10.1149/05805.0135ecst
摘要
The sample preparation of superlattice films for a phase change memory (PCM) and the electrical characteristics of superlattice PCM are reported. Superlattice films with no inclusion of alloy were obtained. The strong RESET pulse width dependence is discussed.
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(2025-6-4)
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