Graphite-like carbon films by high power impulse magnetron sputtering

High-power impulse magnetron sputtering (HiPIMS), coupled with a direct-current magnetron sputtering (dcMS) in parallel, was employed to fabricate graphite-like amorphous carbon (GLC) films. Different impulse voltages were applied in HiPIMS during the film deposition. The structure and mechanical properties of the GLC films deposited by the HiPIMS were investigated. The bonding structure of the films was analyzed by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Atomic force microscopy (AFM) and Nano-indentation were used to characterize the surface quality and micro-hardness, respectively. Internal stress of the films was calculated based on the curvature measured by a laser tester. Tribological behavior of the GLC films is studied by a ball-on-disk tribometer in ambient condition. The effects of impulse voltage on deposition rate, internal stress, mechanical and tribological properties of the GLC films were investigated. The results are analyzed and discussed.