Microstructure, high-temperature corrosion resistance and oxidation properties of (TiVZrCrAl)N high entropy nitride coatings with different N2/Ar ratios

The (TiVZrCrAl)N high-entropy nitride coatings were prepared on Zr-4 alloy substrates by reactive magnetron sputtering with different N2/Ar pressure ratios I values. The microstructure, nanohardness, high-temperature corrosion and steam oxidation resistance properties of the coatings were investigated. The results showed that the thickness of the coating first decreaseds and then increaseds with decreasing N2/Ar pressure ratio, but the hardness first increaseds and then decreaseds. All the coatings exhibited B1-NaCl structure. When I = 1/12, the (TiVZrCrAl)N coating had excellent high-temperature corrosion resistance and steam oxidation performance. The high-temperature steam oxidation mechanisms of the (TiVZrCrAl)N coatings were analyzed in detail.