Pixel-based data preparation for digital scanner

Nikon has been developing the Digital Scanner, an optical maskless exposure tool with a DUV light source. The Digital Scanner uses a spatial light modulator and rasterized pattern data, instead of glass photomasks, to project an optical image. The modulator is a micromirror array and each micromirror takes one of two possible states, so the pattern data are essentially equivalent to a one bit per pixel bitmap image. In spite of the one-bit depth input similar to a black-and-white bitmap, the Digital Scanner can control projected patterns in subpixel resolution because the pixel size is chosen to be smaller than the resolution of the projection optics. Besides the projection hardware, we have also developed special pattern data preparation system for the Digital Scanner in order to realize the subpixel controllability. Polygons from GDSII or OASIS files are rasterized by dedicated pixel-based algorithms so that the optical image of the resulting pixel data becomes equivalent to that of input polygons. Another pattern data converter with optical proximity correction (OPC) capability is also being developed and available for large area conversion. We explain the exposure system of the Digital Scanner and report the progress of the pixel-based data preparation system including recent demonstration printing results of exposure data generated by the new converter that has OPC capability.