Multidisciplinary Design Strategies for Turbomolecular Pumps With Ultrahigh Vacuum Performance

Turbomolecular pumps with ultrahigh vacuum performances are a desired technology among modern vacuum systems, which requires the pump to synchronously possess the wide pumping speed and high vacuum. This paper describes a systematic design methodology for a magnetically levitated turbomolecular pump with consideration of multiphysics constraints, such as the mechanical strength, rotor dynamics, electromagnetic losses, and thermal characteristic. These variables will directly decide the acquisition of high vacuum performances. The design process for such high-performance pumps requires multidisciplinary and highly iterative due to the complex interaction of the many design variables involved. The structure of the bladed rotor is determined in terms of the material selection and mechanical verification. In this paper, an effective modeling method is presented to achieve accurate bending modes of the bladed rotor. An assessment on the loss level and the thermal limit is performed to ensure the temperature rise of the pump within the acceptable range. The measured results show that the pump can achieve the high vacuum performance with the pumping speed of 4370 l/s and the lowest working pressure of 10 ^-8 magnitude. The proposed design process described in this paper provides the general guidelines for the multidisciplinary design of high-performance turbomolecular pumps.