纳米技术
平版印刷术
纳米光刻
材料科学
光刻
光子学
制作
光电子学
医学
病理
替代医学
作者
Yandong Wang,Mengyuan Zhang,Yuekun Lai,Lifeng Chi
出处
期刊:Nano Today
[Elsevier BV]
日期:2018-09-18
卷期号:22: 36-61
被引量:141
标识
DOI:10.1016/j.nantod.2018.08.010
摘要
This article presents a comprehensive review about the current research activities on colloidal lithography, a highly efficient technology for fabricating large-area patterned functional nanostructures. Three aspects are elaborated: i) self-assembly of monolayer of colloidal crystals (MCCs) and their modifications; ii) lithographic patterning methods, including deposition and patterning of functional materials and pattern transfer onto the underlying substrates; iii) promising applications, especially in the optical and photonic-related fields in the past several years. Finally, perspectives on the current challenges and future trends in this area are given. The present review intends to inspire more ingenious designs and exciting research in colloidal lithography for advanced nanofabrication.
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