材料科学
光电子学
电磁屏蔽
制作
薄膜
电磁干扰
溅射
薄板电阻
透射率
导电体
图层(电子)
宽带
电子设备和系统的热管理
电磁干扰
透明导电膜
柔性电子器件
氧化物
溅射沉积
热的
数码产品
干扰(通信)
表征(材料科学)
纳米技术
可穿戴技术
联轴节(管道)
宽禁带半导体
复合材料
墨水池
热阻
热辐射
作者
S. Anand,Yeoung‐Eun Seo,Doha Lim,Sung‐Ryong Kim,Jae‐Joong Kim,Han‐Ki Kim
出处
期刊:Small
[Wiley]
日期:2025-12-26
卷期号:22 (9): e12009-e12009
标识
DOI:10.1002/smll.202512009
摘要
ABSTRACT The advancement of next‐generation multifunctional integrated electronic devices necessitates the development of thin films that exhibit high optical transmittance, effective electromagnetic interference (EMI) shielding performance, mechanical flexibility, sensing, and heating capabilities. Herein, we report the fabrication and characterization of highly conductive MXene/indium–gallium–titanium oxide (IGTO) thin films, in which IGTO is uniformly deposited on the MXene surface using a room‐temperature plasma damage–free sputtering process. This passivated IGTO layer effectively prevents MXene degradation. The best‐performing MXene/IGTO 300 nm film exhibits a low sheet resistance of 24.2 Ω sq −1 , a high transmittance of 73.2 %, and an X‐band EMI shielding effectiveness of >25.12 dB, which exceeds that of a pristine few‐layer MXene film by 21.23 dB. Moreover, the hybrid film demonstrates robust multifunctionality, as exemplified by its mechanical flexibility, high Joule‐heating, and temperature‐sensing performances. These results highlight the high potential of transparent MXene/IGTO films for applications in smart windows and wearable electronic systems.
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