晶体管
摩尔定律
半导体器件制造
半导体工业
平版印刷术
过程(计算)
炸薯条
功率(物理)
水准点(测量)
计算机科学
工程类
功率半导体器件
钥匙(锁)
工程物理
制造工艺
电气工程
半导体
法律与经济学
过程开发
产量(工程)
半导体器件
法学
制造工程
技术预测
纳米技术
在制品
制造业
作者
Manikandan Palanichamy
标识
DOI:10.1002/9781394359462.ch08
摘要
As the semiconductor industry edges closer to the physical limits of Moore's Law, Taiwan Semiconductor Manufacturing Company's (TSMC's) 3 nm (N3) process technology sets a new benchmark with approximately 300 million transistors per square millimeter, delivering up to 15% performance gains and 30% power-efficiency improvements over its 5 nm predecessor. This chapter explores the technological marvel and engineering challenges behind the development of TSMC's N3 process technology. Key innovations such as FinFlex™, Gate-All-Around (GAA) transistor architectures, and extreme ultraviolet (EUV) lithography have enabled these advancements despite daunting manufacturing complexities, power leakage, and quantum effects. Using practical analogies and real-world examples like the A17 Pro chip in the iPhone 15 Pro, the chapter illustrates how TSMC continues to lead in nanoscale semiconductor innovation while navigating the complexities of defect control, yield optimization, and cost-performance trade-offs in the post-Moore era.
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