Active microvalve driven by electro-conjugate fluid jet flow with a hydraulic power source on a chip

Powered microvalves are necessary for a variety of microfluidic applications such as on-demand droplet generators and droplet capture systems. Currently, a central challenge for these microvalve systems is the miniaturization of bulky power sources and control components, for example, air compressors, hydraulic pumps, solenoid valves, and regulators. In this paper, we propose a polydimethylsiloxane (PDMS)-based microvalve integrated with an on-chip power source, an electro-conjugate fluid (ECF) micropump. The assembled PDMS membrane of the device deforms and then blockades the port in the microchannel via fluidic pressure generated by the ECF micropump with the application of high DC voltage. Following finite element method simulations, we utilized 15 electrode pairs for the on-chip ECF micropump. By combining a MEMS process and the bonding process, we successfully realized the designed device and proceeded to evaluation of its performance characteristics. First, we evaluated the performance of the ECF micropump, which showed a maximum output pressure and a flow rate of 49.7 kPa, 87.3 mm3 s−1, respectively, at an applied voltage of 2.0 kV. Second, we found that the minimum sealing pressure of the microvalve was 10 kPa without any load condition. Third, we investigated the cracking pressures, which were 20 kPa and 50 kPa at the applied voltages of 1.5 kV and 2.0 kV to the ECF micropump, respectively. This study experimentally demonstrated the feasibility of the proposed microvalve device and its potential to be integrated into other microfluidic devices for precision control of liquid volumes.