离子液体
材料科学
晶体管
薄膜晶体管
纳米技术
离子键合
门控
作者
Rachel E. Owyeung,Sameer Sonkusale,Matthew J. Panzer
出处
期刊:Journal of Vacuum Science & Technology B
日期:2021-01-01
卷期号:39 (1): 011001-
摘要
Ionic liquid/ionogel gate dielectrics can provide significant advantages for transistor architectures that utilize high surface area semiconductors and/or nonplanar substrates because of their cleanroom-free, liquid-based processability and their inherently large electrostatic double layer capacitance. These attributes of ionogels have already enabled the facile fabrication of several up-and-coming transistor devices geometries for which a highly conformal interface between the electrolyte gate dielectric and the semiconductor is readily achievable, and remote gating with a nonaligned gate electrode is possible. Further, ionogel gating can improve device performance to maximize current densities at low operating voltages. This Perspective highlights three classes of emerging transistor architectures, namely, vertical transistors, surround gate transistors, and thread/fiber-based transistors, and provides several key examples of instances where ionogel gating has either already enabled or still stands to improve device fabrication and performance.
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