Fabrication of Hierarchical Microstructures via Laser-Induced Shrinkage of Shape Memory Polymers for Flexible Pressure Sensing

Hierarchical microstructures are widely recognized as one of the most effective components for enhancing the performance of flexible pressure sensors. However, the rapid and controllable fabrication of pressure sensing layers with hierarchical microstructures remains a significant challenge. In this study, we propose a method that utilizes laser-induced microscale shrinkage of shape memory polymers to enable rapid and controllable fabrication of hierarchical microstructures for high-performance pressure sensing. We systematically investigate the influence of UV laser fabrication parameters on the architecture and morphology of hierarchical microstructures. A flexible pressure sensor, equipped with optimized hierarchical microstructures, exhibits a high sensitivity larger than 15 kPa