Self-organised ordering of scandium into basal monolayers of aluminium nitride and its implication for the growth of well-crystallized (Al,Sc)N materials for electronic devices

Extensive annealing of (Al,Sc)N sputter films reveals an ordering of scandium into basal monolayers. The structural characterisation, a thermodynamic formation model and its implications on (Al,Sc)N material growth and device stability is presented.