Cactus-Inspired Ionic Liquid Functionalized MOF-Based Humidity Sensor for High Response Ultralow Humidity Detection

Accurate monitoring of low humidity exhibits critical application value in semiconductor manufacturing, precision agriculture and related fields. However, most reported low humidity sensors commonly face the limitations of low response value and linearity within ultra-low humidity range (2=0.994), and fast response time of 23.0 s. The sensing mechanism of the sensor is discussed combined with water molecule adsorption process and proton conduction. Furthermore, the potential application of the sensor in water source location is demonstrated. This work provides a promising sensitive material for high performance ultra-low humidity detection.