Progress of Atomic Layer Deposition and Molecular Layer Deposition in the Development of All‐Solid‐State Lithium Batteries

Abstract As one of the most promising candidates for next‐generation high‐energy storage systems, all‐solid‐state lithium batteries (ASSLBs) including the bulk‐type and thin‐film‐type configurations have attracted great attention currently. The rational construction of the electrodes and electrolytes, as well as well‐controlled interface modification, are indispensable for realizing the practical application of ASSLBs. In recent decades, atomic layer deposition (ALD) and molecular layer deposition techniques (MLD) have been widely applied as powerful tools to achieve the accurate control of atomic/molecular thickness and composition adjustment of the thin protective layers or electrodes. Owing to the unique features, ALD/MLD techniques show great potential in manipulation of interfacial properties and constructing novel electrode structures in the research of ASSLBs. In this review, we highlight the recent progress in the developments and applications of ALD/MLD techniques in ASSLBs, including the interface modification for both cathodes and lithium metal anodes in bulk‐type ASSLBs, and the preparation of electrodes and solid electrolytes in thin‐film type batteries. In addition, an overview of the existing challenges and the application prospects of ALD/MLD in ASSLBs are also presented.