纳米压印光刻
材料科学
抵抗
压花
纳米技术
固化(化学)
平版印刷术
热塑性塑料
复合材料
工程物理
工程类
制作
光电子学
医学
替代医学
病理
图层(电子)
作者
Lewis M. Cox,Alina M. Martinez,Adrienne K. Blevins,Nancy Sowan,Yifu Ding,Christopher N. Bowman
出处
期刊:Nano Today
[Elsevier]
日期:2020-01-08
卷期号:31: 100838-100838
被引量:137
标识
DOI:10.1016/j.nantod.2019.100838
摘要
Shortly after its inception, nanoimprint lithography (NIL) was primarily used as tool for the thermal embossing and flash curing of thermoplastic resists and polymer precursors, respectively. Driven by a need for high density material architectures, the semi-conductor industry served as the primary inspiration for NIL development for decades. However, as new resist materials have been explored, the variety of fields investing resources into the technology has grown, and NIL now finds applications actuating numerous organic and inorganic materials, imparting unique manifestations of elastic and plastic deformations. From photovoltaics to water filtration, the role of NIL is growing steadily, and this review illustrates the breadth of its impacts.
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