材料科学
铁电性
铋
钛酸铋
锆钛酸铅
薄膜
极化(电化学)
电极
铁电RAM
光电子学
非易失性存储器
纳米技术
电介质
冶金
物理化学
化学
作者
Bae Ho Park,Bo Soo Kang,Sang Don Bu,Tae Won Noh,Jaichan Lee,William Jo
出处
期刊:Nature
[Nature Portfolio]
日期:1999-10-01
卷期号:401 (6754): 682-684
被引量:2163
摘要
Non-volatile memory devices are so named because they retain information when power is interrupted; thus they are important computer components. In this context, there has been considerable recent interest1,2 in developing non-volatile memories that use ferroelectric thin films—‘ferroelectric random access memories’, or FRAMs—in which information is stored in the polarization state of the ferroelectric material. To realize a practical FRAM, the thin films should satisfy the following criteria: compatibility with existing dynamic random access memory technologies, large remnant polarization (Pr) and reliable polarization-cycling characteristics. Early work focused on lead zirconate titanate (PZT) but, when films of this material were grown on metal electrodes, they generally suffered from a reduction of Pr (‘fatigue’) with polarity switching. Strontium bismuth tantalate (SBT) and related oxides have been proposed to overcome the fatigue problem3, but such materials have other shortcomings, such as a high deposition temperature. Here we show that lanthanum-substituted bismuth titanate thin films provide a promising alternative for FRAM applications. The films are fatigue-free on metal electrodes, they can be deposited at temperatures of ∼650 °C and their values of Pr are larger than those of the SBT films.
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