Ga2O3 Photon‐Controlled Diode for Sensitive DUV/X‐Ray Detection and High‐Resolution Array Imaging Application

Abstract Sensitive high‐energy photon detection from UV to X‐ray and high‐resolution array imaging are critical for medical diagnosis, space exploration, and scientific research. The key challenges for high‐performance photodetector and imaging arrays are the effective material and device design strategies for the miniaturization and integration of the device. Here, photon‐controlled diodes (i.e., the detector has rectifying characteristics only under light irradiation) are proposed for high‐resolution and anti‐crosstalk array imaging applications without integrating the switching element. Based on ultra‐wide bandgap semiconductor Ga 2 O 3 , the sensitive DUV/X‐ray photon‐controlled diodes are realized by the design of high‐resistance Ga 2 O 3 film and high‐barrier contact. The device exhibits remarkable detection performance, including high photo‐responsivity (168 A W −1 ) and specific detectivity (1.45 × 10 15 Jones) under DUV illumination, as well as a high sensitivity (1.23 × 10 5 µ C Gy air −1 cm −2 ) under X‐ray light. Moreover, the low dark current and excellent rectification characteristics are obtained. Furthermore, its potential for high‐density and anti‐crosstalk array imaging applications is verified. These results not only bring forth new insights in the implementation of high‐performance DUV/X‐ray photodetector, but also pave a feasible way to realize high pixel density detector array through the simplified fabrication process for high‐resolution imaging applications.