Scatter analysis of diffractive surface manufactured by single point diamond turning

Single-point diamond turning techniques have been widely used in manufacturing diffractive surfaces in both infrared and visible wave band. There are two important factors in the manufacturing process for obtaining diffractive surface relief profile with high quality, one is diamond turning tool tips resulting in diffractive micro structure blockage and surface finish, and the other is turning feed affecting surface finish. Both of them contribute to total integrated scatter (TIS) and add to veiling glare. The effect of diamond tool tips and turning feed in the manufacturing process on TIS was discussed and analyzed numerically in this paper, and the result was presented.