From Amorphous Carbon to Amphorous Diamond-Like Carbon

Among the various carbon and hydrocarbon PVD coatings, only a few may be called diamond-like carbon (DLC) films. Angus proposed a classification based on the density and hydrogen content of the coatings determining their diamond-like character1. The high density is related to the large fraction of tetrahedral chemical bonds (diamond sp3 hybridization) observed in DLC and the correlatively reduced amount of trigonal bonds (graphite sp2 hybridization). The hydrogen content directly parallels the increase of the average coordination number.KeywordsAverage Coordination NumberElastic Recoil Detection AnalysisDiamondlike Carbon FilmFilm ContaminationTrigonal BondThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.