Research on pyroelectric enhancement mechanism of PZT thin films and optimization design of infrared detectors

Abstract In this paper, the PZT10/90 thin film was successfully deposited on the Pt/TiO 2 /SiO 2 /Si substrate using RF magnetron sputtering, and the dielectric and pyroelectric properties of the thin film were measured and characterized. The measurements show that the dielectric constant of the PZT10/90 thin film is further reduced compared to the previously reported PZT30/70 thin films, which is beneficial for improving the figure of merit of the PZT. The dielectric constant and loss tangent of the PZT10/90 thin film are 173 and 0.016 at 1kHz and the pyroelectric coefficient of the thin film is 20 nC·cm -2 ·K -1 at room temperature. In addition, a pyroelectric infrared detector based on the PZT thin film was designed, a feasible detector fabrication process was proposed, and the structure of the pyroelectric infrared detector was optimized using simulation software based on the finite element method. The developed infrared detector has promising applications in the fields of spectroscopic instruments and smart seekers.