光电子学
微图形化
制作
微接触印刷
平版印刷术
3D打印
基质(水族馆)
光学
光刻
抵抗
微加工
墨水池
微流控
接触印刷品
作者
Hang Chen,Xue Feng,Ying Chen
摘要
Kinetically controlled transfer printing based on rate-dependent adhesion is widely used to heterogeneously integrate micro/nano-devices. Through analysis of peeling stamps with grating-like micropatterns from the rigid substrate in different directions, the directionally dependent adhesion strength is investigated in detail. Experiments of peel test and picking up silicon ribbons from silicon-on-insulator wafer were conducted and consistent with the analytical prediction. The method and analytical results proposed in this Letter can guide the design of the micropatterns on stamp to realize a more effective transfer printing approach.
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