微电子
电介质
材料科学
栅极电介质
高-κ电介质
铜
金属
纳米技术
光电子学
晶体管
电气工程
冶金
工程类
电压
作者
Arif I. Inamdar,Abhishek Pathak,Muhammad Usman,Kuan‐Ru Chiou,Pei-Hsien Tsai,Shruti Mendiratta,Saqib Kamal,Yen‐Hsiang Liu,J.W. Chen,Ming‐Hsi Chiang,Kuang‐Lieh Lu
摘要
A high-κcopper-based metal–organic framework with unusual dielectric behaviour and outstanding water resistant properties was successfully designed for self-protecting microelectronic devices as gate dielectrics.
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