P‐28: Development of Low‐Resistivity Gate‐Metal Process for LTPS‐TFT‐Array Backplane Applications

We fabricated and characterized Low‐Temperature Polycrystalline‐Silicon Thin‐Film Transistors (LTPS TFTs) with low resistivity gate metal on a glass substrate, which can be applied to high refresh driving products. And the technology has been integrated to a gaming‐laptops liquid crystal display and demonstrated. This new LTPS TFTs backplane technology is promising integration for various displays, such as current driving like displays and LCD display.