Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk

Abstract Miniaturized six-axis force/torque sensors have potential applications in robotic tactile sensing, minimally invasive surgery, and other narrow operating spaces, where currently available commercial sensors cannot meet the requirements because of their large size. In this study, a silicon-based capacitive six-axis force/torque sensing chip with a small size of 9.3 × 9.3 × 0.98 mm was designed, fabricated, and tested. A sandwich decoupling structure with a symmetrical layered arrangement of S-shaped beams, comb capacitors, and parallel capacitors was employed. A decoupling theory considering eccentricity and nonlinear effects was derived to realize low axial crosstalk. The proposed S-shaped beams achieved a large measurement range through stress optimization. The results of a coupled multiphysics field finite-element simulation agreed well with those of theoretical analyses. The test results show that the proposed sensing chip can detect six-axis force/torque separately, with all crosstalk errors less than 2.59%FS. Its force and torque measurement ranges can reach as much as 2.5 N and 12.5 N·mm, respectively. The sensing chip also has high sensitivities of 0.52 pF/N and 0.27 pF/(N·mm) for force and torque detection, respectively.