灵敏度(控制系统)
压力传感器
符号
电极
电容感应
材料科学
石墨烯
算法
纳米技术
计算机科学
数学
电子工程
电气工程
机械工程
工程类
物理
算术
量子力学
作者
Shilin Lu,Tianchun Nie,Yang Li,Yuanyue Li,Zhao Yao,Nam Young Kim,Shandong Li
标识
DOI:10.1109/ted.2023.3248000
摘要
Susceptible and flexible pressure sensors have broad application prospects and market demands in bionic skin, human–machine interface, and intelligent wearable electronic devices. However, optimizing the sensor’s sensitivity through a simple, low-cost process is still a considerable challenge. In this work, the sensitivity of a capacitive pressure sensor was effectively improved by optimizing the geometry of the laser-scribed graphene (LSG) electrodes. The pressure sensor, based on the inter-comb structured LSG electrodes and polyvinyl pyrrolidone nanofiber membrane (PVP NM) dielectric layer, has a high sensitivity (4.352 kPa $^{-{1}}$ at 0–2 kPa), a fast response/recovery time (40/37 ms), an ultralow detection limit ( $\sim $ 12 Pa), and excellent mechanical stability (6000 cycles). The sensor developed in this research can be used in health monitoring such as carotid artery pulsation and respiratory disease. In addition, the $6\times $ 6 sensor array can precisely characterize the regional pressure distribution. This study demonstrates the significant potential of the inter-comb structured LSG electrodes in highly sensitive flexible pressure sensors.
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